Wafer Temperature Measurement System | Bidding for Wafer Temperature Measurement System

Wireless Wafer Temperature Measurement System

The RTD Wafer temperature measurement system integrates RTD sensors onto the wafer surface using independently developed core technologies, enabling real-time monitoring and recording of temperature change data during the wafer manufacturing process. It provides an efficient and reliable method for monitoring and optimizing key process parameters in semiconductor manufacturing. With strong anti-interference capability, it can work normally in dry etching environments to accurately monitor etching process temperatures, and precisely measure process temperatures in high-temperature environments.

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Product introduction

Application Scope: Thin Film Deposition (PVD, CVD)

Product Advantages

1、±0.05℃ High-precision Temperature Measurement: RTD sensors provide high-precision temperature readings, ensuring critical steps in semiconductor manufacturing are carried out at optimal temperatures to guarantee product quality.
2、Real-time Temperature Data Acquisition: RTD Wafer enables real-time monitoring of temperature changes during wafer heat treatment and etching, allowing immediate adjustment of process parameters to optimize production efficiency.
3、Temperature Data Analysis Capability: Post-measurement data is analyzed via software to optimize process parameters, improving yield and product quality.
4、Supports Process Adjustment and Verification: Analyzes temperature data collected under actual process conditions to adjust etching and other key process steps for optimal performance.
5、Comprehensive Thermal Distribution Monitoring: Supports simultaneous temperature monitoring at up to 81 positions on the wafer to obtain a comprehensive thermal distribution map.

Product Parameters

Wafer Size	2", 3", 4", 6", 8", 12"	Temperature Sensing Element	RTD
Number of Temperature Measurement Points	1-45	Wafer Material	Silicon Wafer/Sapphire, etc.
Temperature Range	-40-250°C (-40-15°C; 15-250°C)	Communication Mode	Wireless Communication Transmission
Temperature Accuracy	±0.5°C	Sampling Frequency	1Hz/2Hz
Sensor-to-Sensor Deviation	<0.5°C	Supporting Host	Temperature Measurement System Host
Temperature Measurement Software	Specialized software for real-time display of temperature field profiles and heating curves

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