The Wafer Cleaning Machine, also known as the Centrifugal Cleaning Machine.
Functional Advantages: It is used for cleaning surface micro-dust on wafers and other components.
Working Type: Rotary two-fluid spray cleaning + centrifugal drying.
Scope of Application: It can effectively remove micro-dust particles on the surface of Holders, CMOS bodies, Wafers, etc. through high-pressure pure water flushing and water-gas two-fluid cleaning.
Consultation Hotline: 17727430873
This equipment is mainly used for cleaning micro-dust on the surface of wafers. It can effectively remove micro-dust particles on the surface of Holders, CMOS bodies, Wafers, etc. through high-pressure pure water flushing and water-gas two-fluid cleaning.
Cleaning of silicon, dust, and iron filings on the surface of mobile phone camera modules.
Rotary two-fluid spray cleaning + centrifugal drying.
Equipment Appearance Dimensions | 880mm (L) × 960mm (W) × 1880mm (H) |
---|---|
Cleaning Tray Specification | Customized (cleaning tray diameter < ø550mm) |
Cleaning Method | Two-fluid cleaning |
Drying Method | High-speed centrifugal drying |
Power Supply | AC380V 50HZ |
Total Power | 7KW |
Power Consumption | 3.5kw/h during cleaning 1kw/h during standby |
Transmission Horsepower | 3HP |
Environmental Filtration Method | 0.3μm; 99.999% |
Air Filtration Method | 1μm×1; 0.01μm×1 |
Centrifugal Speed | 100-1500RPM |
Pure Water Consumption | 0-7L/Min |
Gas Consumption | 10-30m³/H |
Cleaning Pressure | Liquid pressure: 3-8Kgf/cm² Air pressure: 0.2-0.5Mpa |
DI Water Supply | Flow rate: >7LPM Resistivity: >17MΩ |
Air Source Supply | Pressure: 0.45-0.7Mpa; Flow rate: >30m³/H (cleanliness meets cleaning requirements) |
Pure Water Inlet Diameter | ø12mm hose or PT1/2″ internal thread |
Air Source Inlet Diameter | ø12mm air pipe |
Drain Outlet Diameter | PT 1″ internal thread |
Exhaust Port Diameter | 4″×2 (needs enhanced exhaust, wind speed >3m/sec) |
Net Weight of Machine | 450KG |