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copyright © 2020 Shenzhen ondegao Electronic Technology Co., Ltd For the record,:ICP License: Guangdong No. 18096502
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Wafer Cleaning Machine

The Wafer Cleaning Machine, also known as the Centrifugal Cleaning Machine.


Functional Advantages: It is used for cleaning surface micro-dust on wafers and other components.


Working Type: Rotary two-fluid spray cleaning + centrifugal drying.


Scope of Application: It can effectively remove micro-dust particles on the surface of Holders, CMOS bodies, Wafers, etc. through high-pressure pure water flushing and water-gas two-fluid cleaning.


Consultation Hotline: 17727430873


Product introduction

Machine Introduction:

This equipment is mainly used for cleaning micro-dust on the surface of wafers. It can effectively remove micro-dust particles on the surface of Holders, CMOS bodies, Wafers, etc. through high-pressure pure water flushing and water-gas two-fluid cleaning.

Cleaning Objects:

Cleaning of silicon, dust, and iron filings on the surface of mobile phone camera modules.

Cleaning Method:

Rotary two-fluid spray cleaning + centrifugal drying.

Machine Features:

  • A special cleaning machine for dust and impurities on the wafer surface.

  • Mirror stainless steel integrated closed body, causing no pollution to the working environment and suitable for the use requirements of dust-free workshops.

  • Replaceable cleaning trays for cleaning various products, with the cleaning trays customized according to the products.

  • PLC automatic control for convenient and quick operation.

  • Transparent explosion-proof front door for safe operation and easy observation.

  • Full-system instrument display to monitor the cleaning status at any time.

  • Adopting two-fluid cleaning, featuring high cleaning precision, zero damage to products, and minimal pure water consumption.

  • Rotary spray rod to avoid secondary pollution to products.

  • Equipped with a static electricity elimination device and a cavity wall heating device to assist in achieving the best cleaning effect.

  • Equipped with a 2-stage air filtration system, and the compressed air meets the ISO8573.1 standard.

  • Compact body with a small footprint.

  • Completely cleaned with ultrapure water, in line with the RoHS standard.

Product Parameters

Equipment Appearance Dimensions880mm (L) × 960mm (W) × 1880mm (H)
Cleaning Tray SpecificationCustomized (cleaning tray diameter < ø550mm)
Cleaning MethodTwo-fluid cleaning
Drying MethodHigh-speed centrifugal drying
Power SupplyAC380V 50HZ
Total Power7KW
Power Consumption3.5kw/h during cleaning
1kw/h during standby
Transmission Horsepower3HP
Environmental Filtration Method0.3μm; 99.999%
Air Filtration Method1μm×1; 0.01μm×1
Centrifugal Speed100-1500RPM
Pure Water Consumption0-7L/Min
Gas Consumption10-30m³/H
Cleaning PressureLiquid pressure: 3-8Kgf/cm²
Air pressure: 0.2-0.5Mpa
DI Water SupplyFlow rate: >7LPM
Resistivity: >17MΩ
Air Source SupplyPressure: 0.45-0.7Mpa; Flow rate: >30m³/H (cleanliness meets cleaning requirements)
Pure Water Inlet Diameterø12mm hose or PT1/2″ internal thread
Air Source Inlet Diameterø12mm air pipe
Drain Outlet DiameterPT 1″ internal thread
Exhaust Port Diameter4″×2 (needs enhanced exhaust, wind speed >3m/sec)
Net Weight of Machine450KG


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