Wafer cleaning machine, also known as centrifugal cleaning machine
Functional Advantages: The wafer cleaning machine is used for cleaning surface micro-dust on wafers and other components.
Working Type: Rotary two-fluid spray cleaning + centrifugal drying
Scope of Application: It can effectively remove micro-dust particles on the surface of Holders, CMOS bodies, Wafers, etc. through high-pressure pure water flushing and water-gas two-fluid cleaning.
Consultation Hotline: 17727430873
Machine Introduction:
This equipment is mainly used for cleaning micro-dust on the surface of wafers. It can effectively remove micro-dust particles on the surface of Holders, CMOS bodies, Wafers, etc. through high-pressure pure water flushing and water-gas two-fluid cleaning.
Cleaning Objects: Cleaning of silicon, dust, and iron filings on the surface of mobile phone camera modules;
Cleaning Method: Rotary two-fluid spray cleaning + centrifugal drying;
Machine Features:
● Special cleaning machine for dust and impurities on the wafer surface;
● Mirror stainless steel integrated closed body, no pollution to the working environment, suitable for the use requirements of dust-free workshops;
● Replaceable cleaning trays for cleaning various products, and the cleaning trays are customized according to the products;
● PLC automatic control, convenient and quick operation;
● Transparent explosion-proof front door for safe operation and easy observation;
● Full-system instrument display to monitor the cleaning status at any time;
● Adopting two-fluid cleaning, with high cleaning precision, zero damage to products, and minimal pure water consumption;
● Rotary spray rod to avoid secondary pollution to products;
● Equipped with static electricity elimination device and cavity wall heating device to assist in achieving the best cleaning effect;
● Equipped with a 2-stage air filtration system, and the compressed air meets ISO8573.1 standard;
● Compact body with a small footprint;
● Completely cleaned with ultrapure water, in line with RoHS standards.
Product Parameters
Equipment Appearance Dimensions | 880mm (L) × 960mm (W) × 1880mm (H) | |
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Cleaning Tray Specification | Customized (cleaning tray diameter < ø550mm) | |
Cleaning Method | Two-fluid cleaning | |
Drying Method | High-speed centrifugal drying | |
Power Supply | AC380V 50HZ | |
Total Power | 7KW | |
Power Consumption | 3.5kw/h during cleaning | 1kw/h during standby |
Transmission Horsepower | 3HP | |
Environmental Filtration Method | 0.3μm; 99.999% | |
Air Filtration Method | 1μm×1; 0.01μm×1 | |
Centrifugal Speed | 100-1500RPM | |
Pure Water Consumption | 0-7L/Min | |
Gas Consumption | 10-30m³/H | |
Cleaning Pressure | Liquid pressure: 3-8Kgf/cm² | Air pressure: 0.2-0.5Mpa |
DI Water Supply | Flow rate: >7LPM | Resistivity: >17MΩ |
Air Source Supply | Pressure: 0.45-0.7Mpa; Flow rate: >30m³/H (cleanliness meets cleaning requirements) | |
Pure Water Inlet Diameter | ø12mm hose or PT1/2″ internal thread | |
Air Source Inlet Diameter | ø12mm air pipe | |
Drain Outlet Diameter | PT 1″ internal thread | |
Exhaust Port Diameter | 4″×2 (needs enhanced exhaust, wind speed >3m/sec) | |
Net Weight of Machine | 450KG |